Case Studies - aixACCT Systems

Driving Innovation in Piezoelectric Materials Research

These case studies highlight how our solutions have enabled researchers and industrial partners to gain unprecedented insights into the complex interplay between material composition and functional properties — often uncovering correlations that were previously inaccessible in practice.

Explore how aixACCT’s technologies have helped overcome technical barriers and accelerated progress in materials science across various application fields.

From Yield Crisis to Process Control: How MEMS Production was Optimized with aixDBLI
A global leader in data storage technologies, faced a severe yield issue in the production of piezoelectric MEMS devices. Despite using well-characterized AlN thin films with excellent structural properties and favourable results in electrical testing, the final device performance varied dramatically — from fully functional to completely inoperative. These inconsistencies caused major roadblocks in scaling production and meeting quality standards.

At that time, the company lacked a method to reliably measure the true piezoelectric performance of the thin films before device completion. The core issue: piezoelectric properties could only be indirectly inferred at the device level — too late for effective process feedback and optimization

aixACCT Systems introduced its Double Beam Laser Interferometry (aixDBLI) system to the customers MEMS line. This optical method allows ultra-precise measurement of piezoelectric coefficients (d33,f and e31,f) directly on wafers with structured electrodes, even while the films are still clamped to a substrate.

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Reliable d₃₃ Measurement of Zinc Oxide Nanowire Arrays
Piezoelectric energy harvesting offers a way to power micro- and nanoscale devices by converting vibrations into electricity. Zinc oxide nanowires and nanowire arrays are especially promising due to their non-toxic, low-cost, and efficient piezoelectric properties, making them ideal for piezoelectric nanogenerators (PENGs), MEMS/NEMS devices, and self-powered flexible microelectronics in wearables, sensors and wireless energy harvesters.
The widespread characterization method is direct piezoelectric d₃₃ measurement. Conventional devices suffer from charge leakage, mechanical instabilities, and parasitic vibrations, limiting reliable and reproducible piezoelectric coefficient characterization. A major challenge has been achieved addressing known issues and using traceable metrology.

Through the European EMPIR Horizon 2020 program, collaboration between PTB Germany, Electroscience Ltd., and aixACCT Systems GmbH developed reliable, reproducible and traceable metrology solution.

This breakthrough supports nanowire energy harvesting, flexible energy systems, and next-generation piezotronic strain devices in nanotechnology.

Driving Innovation in Piezoelectric Materials Research

From Yield Crisis to Process Control: How MEMS Production was Optimized with aixDBLI

Reliable d₃₃ Measurement of Zinc Oxide Nanowire Arrays