4-Point Bending system (aix4PB)
 Sample geometry | Specifications
 Measurement configuration
The diagram shows the typical measurement set up. Within this the TF Analyzer runs the measurement
software, controls the actuator to apply the bending force, and records simultaneously the bending
displacement of the laser interferometer and the charge response of the sample.
Sample Geometry
A sample geometry like it is shown and specified below guarantees precise boundary and
bending measurement conditions.
| Sample length |
l = 25 mm |
| Length top electrode |
lTE = 8 mm |
| Length top electrode contact |
lTE2 = 7 mm |
| Length d33top electrode |
lTE3 = 1 mm |
| Length bottom electrode |
lBE = 4 mm |
| Distance top electrode |
d = 8.5 mm |
| Sample width |
w = 3 mm |
| Width top electrode |
wTE = 2 mm |
| Width top electrode contact |
wTE2 = 0.1 mm |
Features / Specifications
Standard features of the 4-Point Bending system are:
- 4-point bending sample holder with
- piezo actuator for force generation,
- fixture for laser vibrometer, and
- easy contact to top and bottom electrode of the sample
- All measurement capabilities of the TF Anlayzer 2000 system including
- Windows 2000 / XP operating system
- Remote access and script control available as option
- Single Beam Laser Vibrometer with a minimum resolution of 1 nm
Detailed specifications and overall performance are strongly dependent on the integrated single components.
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MEMS Products
