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Double Beam Laser Interferometer (aixDBLI)
 Technical Data
| Resolution |
1 pm tested by x-cut Quartz |
| Displacement/strain measurement |
- > 50 Hz
- down to 1 Hz for reduced resolution
- 100 mV to 10 V
up to 25 V (optional)
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| Piezoelectric d33 coefficient |
| Bias voltage |
(1 mHz to 1 Hz)
100 mV to 10 V
up to 25 V (optional) |
| Small signal |
(1 kHz to 10 kHz)
100 mV to 10 V |
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| Electrostriction M33 |
Similar to d33 |
| C(V) Measurement |
| Bias voltage |
(1 mHz to 1 Hz)
100 mV to 10 V
up to 25 V (optional) |
| Small signal |
(1 kHz to 10 kHz)
100 mV to 10 V |
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MEMS Products