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Presentations (since 2000)

Book Contributions

Scanning Probe Microscopy
Electrical and Electromechanical Phenomena at the Nanoscale
Sergei V. Kalinin, Alexei Gruverman (Eds.)
2007, XL, 1008 pages with 365 illustrations, 15 in colour, Hardcover
ISBN-10: 0-387-28667-5
ISBN-13: 978-0-387-28667-9

Chapter III 9: Electrical Characterization of Perovskite Nanostructures by SPM (S. Tiedke, K. Szot, B. Reichenberg, F. Peter, and R. Waser)

Nanoscale Characterisation of Ferroelectric Materials - Scanning Probe Microscopy Approach
M. Alexe, A. Gruverman (Eds.) - Series: NanoScience and Technology 2004, XIV, 282 pages with 166 figures, Hardcover - ISBN: 3-540-20662-0

Polar Oxides - Properties, Characterization and Imaging
R. Waser, U. Böttger, S. Tiedke (Eds.) 2004.IV,
387 pages with 288 figures and 7 tables, Hardcover - ISBN: 3-527-40532-1

Chapter 3: Electrical Characterization of Ferroelectrics (K. Prume, T. Schmitz, S. Tiedke)

Chapter 17: Electrical Characterization of Ferroelectric Properties in the Sub-Micrometer Scale (T. Schmitz, S. Tiedke, K. Prume, K. Szot, A. Roelofs)

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Publications (since 2000)

K. Prume, P. Muralt, T. Schmitz-Kempen, S. Tiedke: Tensile and Compressive Stress Dependency of the Transverse (e31,f) Piezoelectric Coefficient of PZT Thin Films for MEMS Devices, Marcelo J. Dapino, Editor, Proc. of SPIE Vol. 6526, 65260G 1-12, 2007.

H. Raeder, F. Tyholdt, W. Booij, N.P. Oestboe, R. Bredesen, K. Prume, G. Rijnders, and P. Muralt: Taking piezoelectric microsystems from the laboratory to production, J. Electroceramics, DOI 10.1007/s10832-007-9036-3 (2007)

K. Prume, P. Muralt, F. Calame, T. Schmitz-Kempen, and Stephan Tiedke: Piezoelectric thin films: Evaluation of electrical and electromechanical characteristics for MEMS devices, IEEE Trans. UFFC, 54:8–14 (2007)

W.E. Booij, A.N. Vogl, D.T. Wang, F. Tyholdt, N.P. Oestboe, H. Raeder, and K. Prume: A simple and powerful analytical model for MEMS piezoelectric multimorphs, J. Electroceramics, DOI 10.1007/s10832-007-9034-5 (2007)

F. Tyholdt, F. Calame, K. Prume H. Raeder, and P. Muralt: Chemically Derived Seeding Layer for {100}-textured PZT Thin Films, J. Electroceramics, DOI 10.1007/s10832-007-9037-2 (2007)

K. Prume, P. Muralt, F. Calame, T. Schmitz-Kempen, and S. Tiedke: Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals, J. Electroceramics, DOI 10.1007/s10832-007-9065-y 8 (2007)

F. Peter, J. Kubacki, K. Szot, B. Reichenberg, and R. Waser: Influence of adsorbates on the piezoresponse of KNbO3, Phys. Stat. Sol. A, 203:616 - 621 (2006)

F. Peter, B. Reichenberg, A. Rüdiger, R. Waser, and K. Szot: Extrinsic contributions to piezoresponse force microscopy. Mater. Res. Soc. Symp. Proc., 902E (2006)

F. Peter, A. Rüdiger, R. Dittmann, R. Waser, K. Szot, B. Reichenberg, K. Prume: Analysis of shape effects on the piezoresponse in ferroelectric nanograins with and without adsorbates. Appl. Phys. Lett., 87(8):082901 (2005)

B. Reichenberg, S. Tiedke, K. Szot, F. Peter, R. Waser, S. Tappe, T. Schneller: Contact mode potentiometric measurements with an atomic force microscope on high resistive perovskite thin films, J. Europ. Ceram. Soc., 25, 2353 - 2356 (2005)

R. Meyer, S. Tiedke, T. Schmitz, K. Prume: Dynamic leakage current compensation in ferroelectric thin film capacitor structures, Appl. Phys. Lett., 86, 142907 (2005).

K. Prume, P. Gerber, C. Kügeler, A. Roelofs, U. Böttger, R. Waser, T. Schmitz-Kempen, S. Tiedke: Simulation and measurements of the piezoelectric properties response (d33) of piezoelectric layered thin film structures influenced by the top electrode size, 14th IEEE International Symposium on Applications of Ferroelectrics - ISAF-04, 7 - 10 (2004).

A. Rüdiger, T. Schneller, A. Roelofs, S. Tiedke, T. Schmitz, R. Waser: Nanosize ferroelectric oxides - tracking down the superparaelectric limit, Appl. Phys. A, (2004).

F. Peter, K. Szot, R. Waser, B. Reichenberg, S. Tiedke, J. Szade: Piezoresponse in the light of surface adsorbates: Relevance of defined surface conditions for perovskite materials, Appl. Phys. Lett., 85, 2896 - 2898 (2004).

S. Tiedke, T. Schmitz, R. Bruchhaus, M. Jacob, and I. Kunishima: Single Cell Capacitor Hysteresis Loop Testing on Wafer Level on a 32MB Chain FeRAM After Full Integration, presentation at ISIF Gyeongju, Korea, April 5-8, 2004; Integrated Ferroelectrics, 67: 79–83 (2004)

T. Schmitz, S. Tiedke, and U. Ellerkmann: From Submicron Stand-Alone Capacitor Testing to Fast Pulse Switching Experiments and Testing of Fully Integrated Ferroelectric 1T-1C Test Structures, presentation at ISIF Gyeongju, Korea, April 5-8, 2004; Integrated Ferroelectrics, 67: 125–131 (2004)

B. Reichenberg, K. Szot, T. Schneller, U. Breuer, S. Tiedke, R. Waser: Inhomogeneous Local Conductivity Induced by Thermal Reduction in BaTiO₃ Thin Films and Single Crystals, Integrated Ferroelectrics, 61, 43 - 49 (2004).

P. Gerber, A. Roelofs, C. Kügeler, U. Böttger, R. Waser, K. Prume: Effects of the top-electrode size on the piezoelectric properties (d33 and S) of lead zirconate titanate thin films, J. Appl. Phys., 96, 2800 - 2804 (2004).

T. Schmitz, K. Prume, B. Reichenberg, A. Roelofs, R. Waser, S. Tiedke: In-situ compensation of the parasitic capacitance for nanoscale hysteresis measurements, J. Europ. Ceram. Soc., 24, 1145 - 1147 (2004).

T. Schmitz, S. Tiedke, K. Prume, A. Roelofs, R. Waser, K. Szot: High Speed and High Resolution Measurements on Submicron Capacitors for FeRAM Application, Integrated Ferroelectrics, 53, 371 - 378 (2003).

K. Prume, K. Franken, U. Böttger, R. Waser, H. R. Maier: Modelling and numerical simulation of the electrical, mechanical, and thermal coupled behaviour of MLCs, J. Europ. Ceram. Soc., 22, 1285 - 1296 (2002).

K. Prume, A. Roelofs, T. Schmitz, B. Reichenberg, S. Tiedke, R. Waser: Compensation of the parasitic capacitance of a scanning force microscope cantilever used for measurements on ferroelectric capacitors of submicron size by means of finite element simulations, Jpn. J. Appl. Phys. 41, 7198 - 7201 (2002).

K. Prume, S. Hoffmann, R. Waser: Finite Element Simulations of Interdigital Electrode Structures on High Permittivity Thin Films, Integrated Ferroelectrics, 32, 63 - 72 (2001).

S. Tiedke, T. Schmitz, K. Prume, A. Roelofs, T. Schneller, U. Kall, R. Waser, C.S. Ganpule, V. Nagarajan, A. Stanishevsky, R. Ramesh: Direct hysteresis measurements of single nanosized ferroelectric capacitors contacted with an atomic force microscope, Appl. Phys. Lett. 79, 3678 - 3680 (2001).

T. Schmitz, K. Prume, S. Tiedke, A. Roelofs, T. Schneller, U. Kall, M. Grossmann, R. Waser, C. Ganpule, A. Stanishefsky, R. Ramesh: Electrical Measurements on Capacitor Sizes in the Submicron Regime for the Characterization of Real Memory Cell Capacitors, Integrated Ferroelectrics, 37, 163 - 172 (2001).

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Presentations (since 2000)

K. Prume, P. Muralt, T. Schmitz-Kempen, S. Tiedke: Electrical and Electromechanical Properties of Piezoelectric Thin Films for MEMS Applications: Influence of Structure and Mechanical Stress, 2007 IEEE International Ultrasonics Symposium, New York, October 29 - 31, 2007.

K. Prume, P. Muralt, T. Schmitz-Kempen, S. Tiedke: Influence of Structure and Mechanical Stress on Electrical and Electromechanical Properties of Piezoelectric Thin Films: Measurements and Simulations, Ferroelectrics UK Meeting Dundee, August 21 - 22, 2007.

S. Tiedke, K. Prume, T. Schmitz-Kempen: Electrical and electromechanical characterization of piezoelectric thin films in view of MEMS application (invited), ISAF 2007 Nara (Japan), May 27 - 31, 2007.

K. Prume, P. Muralt, T. Schmitz-Kempen, S. Tiedke: Tensile and Compressive Stress Dependency of the Transverse (e31,f) Piezoelectric Coefficient of PZT Thin Films for MEMS Devices, SPIE Smart Structures and Materials, March 18 - 22, 2007.

K. Prume, P. Muralt, T. Schmitz-Kempen, S. Tiedke: Electromechanical characterization of piezoelectric thin films, bulk ceramics, and multilayer devices, Piezoelectricity for end users III, Liberec, Czech Republic, February 7 - 9, 2007.

K. Prume, P. Muralt, F. Calame, T. Schmitz-Kempen, S. Tiedke: Effective transverse piezoelectric coefficient (e31,f) measurements of PZT thin films for MEMS devices, ISAF 2006 Sunset Beach (USA), July 30 - August 2, 2006.

B. Reichenberg, F. Peter, S. Tiedke, R. Waser, K. Szot: Local Conductivity and Piezoresponse of Polycrystaline Thin Film BaTiO₃ in Ferro- and Para-Phase, Electroceramics X Toledo (Spain), June 18 - 22, 2006.

S. Tiedke, K. Prume, P. Muralt, F. Calame, T. Schmitz-Kempen: Measurement Of The Transverse Effective Piezoelectric Coefficient (e31,f) of PZT Thin Films By Applying Homogeneous Uniaxial Stress, ISIF 2006 Honolulu (USA), April 23 - 27, 2006.

S.Tiedke, T.Schmitz, C.Pithan, D. Hennings: Electrical Characterization of Electroceramics in View of Nanograin Materials, Japanese-German Workshop on Nanocrystalline Dielectrics and Their Application, Niigata, May 20th, 2005.

S. Tiedke, T. Schmitz, K. Prume: Nanoscale Electrical Characterization of Ferroelectrics, Sino-German Workshop, Xi´an, March 5th, 2005.

K. Prume, P. Gerber, C. Kügeler, U. Böttger, R. Waser, T. Schmitz and S. Tiedke: Substrate And Structure Dependencies Of The Effective Piezoelectric Coefficient (d33,eff) Of PZT Thin Films: Simulations And Measurements, ISIF 2005 Shanghai (China), April 17-20, 2005.

T. Schmitz, R. Bruchhaus, G. Beitel, and S. Tiedke: Monitoring The Switching Process Of Ferroelectric Memory Cell Capacitors Of A 32Mb Chain FeRAM, ISIF 2005 Shanghai (China), April 17-20, 2005.

S. Tiedke: Single cell analog testing for rapid process optimization of FeRAM devices, Workshop CREMSI, Disruptive technologies for Non Volatile Memories, MRAM, FeRAM, PCRAM, Aix on Provence (France), 2004.

S. Tiedke: Electrical Testing of Ferroelectric Nanostructures, E-MRS Spring Meeting, Strasbourg (France), 2004.

A. Roelofs, T. Schneller, R. Waser, K. Szot, K. Prume: Piezoresponse Force Microscopy Study Reaching the Limit of Ferroelectricity, ISIF 2003 Colorado Springs (USA), March 9-12, 2003.

S. Tiedke: Nanoscale Electrical Testing of Ferroelectrics, EMF 10, Cambridge (England), 2003.

T. Schmitz, S. Tiedke: Electrical characterization of ferroelectric thin films, Polecer Meeting, June 8-11, Capri (Italy), 2003.

S. Tiedke, T. Schmitz, K. Prume, A. Roelofs, K. Szot, R. Waser: Nanoscale Electrical Characterization of Ferroelectrics, Polecer Meeting, June 8-11, Capri (Italy), 2003.

R. Waser, A. Roelofs, T. Schneller, K. Szot, S. Tiedke: Towards the Superparaelectric limit of ferroelectric nanosized grains, Trends in Nanotechnology, September 9-13, Santiago de Compostela (Spain) 2002.

S. Tiedke, J. Rickes, T. Schmitz, R. Waser: Wafer-level testing of single 1T-1C ferroelectric memory cells, The International Joint Conference on the Applications of Ferroelectrics (IFFF 2002), May 28-June 1, Nara (Japan) 2002.

K. Prume: Finite-Element Modeling of the Coupled Electrical, Mechanical, and Thermal Properties of Piezoelectric Devices, Tutorial Talk on Piezoelectric Materials for the End User, Interlaken, 2002.

S. Tiedke, T. Schmitz, Tutorial Session: Testing and Characterization. International Symposium on Integrated Ferroelectrics, ISIF 2000 Aachen (Germany), March 12 - 15, 2000.

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